发明名称 Apparatus for feeding granular silicon material.
摘要 <p>The invention relates to an apparatus for feeding granular silicon material which comprises a hopper (13) for storing granular silicon material, a feeder (15) for feeding the granular silicon material stored in the hopper (13), a first guide tube (16) for leading granular silicon material fed from the feeder (15), a feed tube (19) for feeding granular silicon material, which is arranged in a lower portion of the first guide tube (16) and movable upward and downward, a housing (11) incorporating the hopper (13), the feeder (15) the first guide tube (16) and the feed tube (19), a sluice valve (18) for closing an opening of a chamber of the apparatus for manufacturing silicon single crystals, and a second guide tube (21) which is positioned in a portion of the opening of a chamber (10) and which leads granular silicon material to a crucible for melting granular silicon material.</p>
申请公布号 EP0406824(A1) 申请公布日期 1991.01.09
申请号 EP19900112760 申请日期 1990.07.04
申请人 NKK CORPORATION 发明人 MOHRI, YOSHIO, C/O PATENT & LINCENSE DEPARTMENT
分类号 C30B15/02;C30B29/06;H01L21/208 主分类号 C30B15/02
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