SELF-ALIGNED PROCESS FOR MANUFACTURING A GATE ELECTRODE,申请号EP19890115505-传众专利搜索

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发明名称	SELF-ALIGNED PROCESS FOR MANUFACTURING A GATE ELECTRODE
摘要
申请公布号	EP0358042(A3)	申请公布日期	1991.01.09
申请号	EP19890115505	申请日期	1989.08.23
申请人	LICENTIA PATENT-VERWALTUNGS-GMBH;TELEFUNKEN ELECTRONIC GMBH	发明人	DICKMANN, JURGEN, DIPL.-ING.
分类号	H01L21/285;H01L21/338;(IPC1-7):H01L21/28	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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