发明名称 Metalorganic deposition of superconducting Yb-Ba-Cu-O thin films by rapid thermal annealing
摘要 A superconducting Yb1Ba2Cu4Oz thin film is formed by a metalorganic deposition method which comprises depositing a solution comprising neodecanoates of Yb, Ba and Cu and a solvent having at least approximately 10 volume percent pyridine in xylene onto a substrate selected from the group consisting of strontium titanate, barium titante, and sapphire; pyrolyzing the coated substrate to thermally decompose the neodecanoates at a temperature of about 500 DEG C. followed by a rapid thermal annealing.
申请公布号 US4983577(A) 申请公布日期 1991.01.08
申请号 US19870136585 申请日期 1987.12.22
申请人 GENERAL MOTORS CORPORATION 发明人 MANTESE, JOSEPH V.;MICHELI, ADOLPH L.;HAMDI, ABOUD H.
分类号 C23C18/12;H01L39/24 主分类号 C23C18/12
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