发明名称 |
Metalorganic deposition of superconducting Yb-Ba-Cu-O thin films by rapid thermal annealing |
摘要 |
A superconducting Yb1Ba2Cu4Oz thin film is formed by a metalorganic deposition method which comprises depositing a solution comprising neodecanoates of Yb, Ba and Cu and a solvent having at least approximately 10 volume percent pyridine in xylene onto a substrate selected from the group consisting of strontium titanate, barium titante, and sapphire; pyrolyzing the coated substrate to thermally decompose the neodecanoates at a temperature of about 500 DEG C. followed by a rapid thermal annealing.
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申请公布号 |
US4983577(A) |
申请公布日期 |
1991.01.08 |
申请号 |
US19870136585 |
申请日期 |
1987.12.22 |
申请人 |
GENERAL MOTORS CORPORATION |
发明人 |
MANTESE, JOSEPH V.;MICHELI, ADOLPH L.;HAMDI, ABOUD H. |
分类号 |
C23C18/12;H01L39/24 |
主分类号 |
C23C18/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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