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发明名称
Diffraction type optical encoder with improved detection signal insensitivity to optical grating gap variations
摘要
申请公布号
US4983825(A)
申请公布日期
1991.01.08
申请号
US19900490463
申请日期
1990.03.08
申请人
MITUTOYO CORPORATION
发明人
ICHIKAWA, SOUJI;OKA, HIDEKI;TERAO, NAOYOSHI;SAKAGAMI, SEIJI
分类号
G01D5/36
主分类号
G01D5/36
代理机构
代理人
主权项
地址
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