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发明名称
Actuator
摘要
申请公布号
US4983875(A)
申请公布日期
1991.01.08
申请号
US19890367663
申请日期
1989.06.19
申请人
HITACHI, LTD.
发明人
MASAKI, RYOSO;KAYAMA, MASAHIRO;HAYASHIDA, HIROSHI;NIHEI, HIDEKI;KATAYAMA, YASUNORI;NAGASE, HIROSHI;MATSUDA, TOSHIHIKO;KAMIYAMA, KENZO
分类号
B25J9/04;B25J17/02;B25J19/02;H01L41/09
主分类号
B25J9/04
代理机构
代理人
主权项
地址
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