| 摘要 |
<p>PURPOSE:To land a shifting element to a fixing element softly in a short time thereby obtaining a shock absorber simple in design by providing first an second bodies which move relatively and stop the movement by bringing one hand into contact with the other hand, and supplying fluid between the contact faces of these first and second bodies. CONSTITUTION:After replacing the wafer 7 on a wafer chuck 7, a rear plate 2 is shifted at high speed in the direction of a base 4 by an air cylinder 1. The compressed air, which is made by a compressor 11 while the rear plate 2 is shifted in the direction of nearing the base 4, jets out from an air jetting part 5 through a three-phase solenoid valve 10. Hereby, when the distance between the rear plate 2 and the base 4 has become small, static pressure is constituted between both faces. By the reaction of this static pressure, the rear plate 2 attenuates, and stands still at the place where the driving force by the air cylinder 1 and the reaction by static pressure have balanced. And after the rear plate 2 contacts with the base 4, the air jetting part 5 functions as a vacuum suction part by changing over the solenoid valve 10, and fixed the rear plate and the base 4.</p> |
