| 摘要 |
PCT No. PCT/CH90/00145 Sec. 371 Date Feb. 13, 1991 Sec. 102(e) Date Feb. 13, 1991 PCT Filed Jun. 12, 1990 PCT Pub. No. WO90/15929 PCT Pub. Date Dec. 27, 1990.Pumping takes place within the micro-pump as a result of the deformation of a plate (12) using a piezo-electric pad (13). The deformation produces a variation in volume within a pumping chamber (15) defined inside a plate (11) which is made of a material which can be machined using photolithographic processes. The pump outlet (3) is blocked off, selectively, by a membraned check-valve (18) which is in direct communication with another check-valve (16) via the pumping chamber. The check-valve (16) selectively enables the pumping chamber to communicate with the pump inlet (2). The outlet valve membrane (18) has a layer of oxide (17) providing a pretension on closing. The check-valve thus has a regulatory effect on the pump operation, making the flow almost independent of the outlet (3) pressure. Application: injection of exact doses of medication. |
