发明名称 |
WAFER FLIP APPARATUS |
摘要 |
WAFER FLIP APPARATUS Apparatus is disclosed for automatically transferring a semiconductor wafer between a horizontal and a vertical plane, beginning and ending in precisely located positions. A wafer support arm is carried by a transfer member which also includes means for rotating the support arm between a "start" position and an intermediate position in a horizontal plane. Means are provided for rotating the transfer member to position the support arm in a vertical plane. The wafer support arm is then returned to its original position relative to the transfer means, thus establishing a "finish" position in the vertical plane. |
申请公布号 |
CA1278879(C) |
申请公布日期 |
1991.01.08 |
申请号 |
CA19880558131 |
申请日期 |
1988.02.04 |
申请人 |
PERKIN-ELMER CORPORATION (THE) |
发明人 |
BYERS, WILLIAM;KOCHERSPERGER, PETER |
分类号 |
H01L21/677;B65G49/07;B65H5/18;H01L21/683 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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