| 摘要 |
In a scanning electron microscope scanning a specimen by an electron beam, the electron beam is two-dimensionally deflected so that a deflection fulcrum for the electron beam is located on the principal plane of an objective lens. Further, in order that the electron beam is incident on the specimen at a predetermined angle of incidence, the electron beam is deflected in a relation in which the object point of the objective lens provides another deflection fulcrum. The angle of incidence of the electron beam incident on the specimen is changed over between + theta and - theta , thereby providing a pair of stereoscopic scanned images of the specimen.
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