VACUUM CHAMBER PRESSURE CONTROL SYSTEM,申请号JP19890135057-传众专利搜索

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发明名称	VACUUM CHAMBER PRESSURE CONTROL SYSTEM
摘要
申请公布号	JPH03982(A)	申请公布日期	1991.01.07
申请号	JP19890135057	申请日期	1989.05.29
申请人	HITACHI ELECTRON ENG CO LTD	发明人	SHIMONO MASAKI
分类号	F04B37/16	主分类号	F04B37/16
代理机构		代理人
主权项
地址

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