发明名称 |
Method for fabricating a silicon accelerometer responsive to three orthogonal force components |
摘要 |
An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.
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申请公布号 |
US4981552(A) |
申请公布日期 |
1991.01.01 |
申请号 |
US19900462190 |
申请日期 |
1990.01.09 |
申请人 |
FORD MOTOR COMPANY |
发明人 |
MIKKOR, MATI |
分类号 |
G01P15/08;G01P15/12;G01P15/18 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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