发明名称 Copper etching bath and method of using
摘要 Baths for the chemical polishing of copper or copper alloy surfaces, comprising, in aqueous solution, hydrogen peroxide, chloride ions, phosphoric acid and phosphate and hydrogenphosphate ions, in quantities adjusted so as to impart a pH of between 1.25 and 3 to the bath.
申请公布号 US4981553(A) 申请公布日期 1991.01.01
申请号 US19880245340 申请日期 1988.09.16
申请人 SOLVAY & CIE (SOCIETE ANONYME) 发明人 TYTGAT, DANIEL;MAGNUS, STEFAAN
分类号 C23F3/00;C23F3/06 主分类号 C23F3/00
代理机构 代理人
主权项
地址