发明名称 ULTRA-TALL INDIUM OR ALLOY BUMP ARRAY FOR IR DETECTOR HYBRIDS AND MICRO-ELECTRONICS
摘要 Method for improving particular interconnect pads for microcircuitry so that they provide more compliant interconnections between opposed pairs of contacts of the microchips (42,44) in a hybrid detector array assembly. The individual tubes (34) of prior art interconnect pads are filled with indium and are then etched away to leave indium columns (40) of increased height, relative to the indium bumps (46) that have heretofore been used in the contact connections of hybrid detector array assemblies. Other materials may be substituted for the indium and a number of variants of the process are also disclosed.
申请公布号 CA2017743(A1) 申请公布日期 1990.12.31
申请号 CA19902017743 申请日期 1990.05.29
申请人 HUGHES AIRCRAFT COMPANY 发明人 HU, WILLIAM C.;LONGERICH, ERNEST P.;D'AGOSTINO, SAVERIO A.
分类号 H01L25/16;H01L21/98;H01L23/485;H01L27/00;H01L27/14;H01L27/146;H05K3/34 主分类号 H01L25/16
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