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发明名称
PROCEDE D'EXPOSITION D'UNE PASTILLE DE SEMI-CONDUCTEUR PAR UNE LAMPE A VAPEUR DE MERCURE
摘要
申请公布号
FR2567279(B1)
申请公布日期
1990.12.28
申请号
FR19850002941
申请日期
1985.02.28
申请人
USHIO DENKI KK
发明人
TAKEHIRO KIRA
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/22;H01L21/78;H05B41/16
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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