MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19890133209-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02312234(A)	申请公布日期	1990.12.27
申请号	JP19890133209	申请日期	1989.05.26
申请人	MITSUBISHI ELECTRIC CORP	发明人	ARIMA HIDEKAZU;HASHIZUME YASUYUKI
分类号	H01L21/76;H01L21/316	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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