Method for supplying vacuum evaporation material and apparatus therefor.

摘要

The method for supplying a vacuum evaporation material, in which a first vacuum evaporation material (1) accommodated in a crucible (2) is heated to be fused, is characterized in that when a thin film (9) is formed by adhering vapor generated from the first material (1) to a substrate (8), a second vacuum evaporation material (3), which is long, is fed in a positive direction on an average of feed speed of the second material (3) by alternately switching a feed direction thereof between the positive direction and a negative direction, supposing that a direction in which the second material (3) moves toward the first material (1) which has fused in the crucible (2) is the positive direction and a direction in which the second material (3) moves backward therefrom is the negative direction. The apparatus for supplying a vacuum evaporation material, characterized by including: a device for forming the thin film (9) by heating and melting the first material (1) accommodated in the crucible (2) and adhering vapor generated from the first material (1) to the substrate (8); and a vacuum evaporation material feed device for feeding the second material (3) in a condition in which the second material (3) is fed in the positive direction on an average of feed speed of the second material (3) by alternately switching the feed direction thereof between the positive direction and the negative direction.