| 摘要 |
PURPOSE:To prevent thoroughly the dropping of a remaining chemical soln. onto a substrate to be treated by ejecting an inert gas from a tank for accumulator provided between the nozzle of a supply pipeline for the pressurized inert gas and a stop valve for a short while after spraying of the chemical soln. CONSTITUTION:A stop valve SV1 is opened by the signal from a controller 15, and a chemical soln. 10 is sprayed uniformly in the form of a mist at a specified rate onto the surface of a substrate 17 to be treated by a pressurized inert gas. When the chemical soln. 10 is sprayed at the amt. required for the prescribed surface treatment of the substrate 17 for the time set by the controller 15, the valve SV1 is closed by the output signal from the controller 15, and the inert gas in a pipeline 13 and a branch pipeline 16' is released to the atmosphere from the nozzle 14 until the pressure thereof balances with the atmospheric pressure, then the supply of the soln. 10 is stopped. The pressurized inert gas in a tank 21 for accumulator is ejected from the nozzle 14 for a short time in succession to the stop of the supply so that the remaining chemical soln. is scattered in the form of a mist to the outside. |
