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发明名称
PLASMA ETCHING PROCESS
摘要
申请公布号
JPH02312229(A)
申请公布日期
1990.12.27
申请号
JP19890134408
申请日期
1989.05.26
申请人
FUJI ELECTRIC CO LTD
发明人
YOSHIDA TAKASHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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