SUBSTRATE HOLDER FOR LIQUID PHASE EPITAXIAL GROWTH,申请号JP19890134023-传众专利搜索

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发明名称	SUBSTRATE HOLDER FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号	JPH02312247(A)	申请公布日期	1990.12.27
申请号	JP19890134023	申请日期	1989.05.26
申请人	FUJITSU LTD	发明人	YAMAMOTO KOSAKU;KAWACHI TETSUYA;SAITO TETSUO;YAMAMOTO TAMOTSU;WATANABE YOSHIO
分类号	C30B19/00;H01L21/368	主分类号	C30B19/00
代理机构		代理人
主权项
地址

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