| 摘要 |
PURPOSE:To contrive simplification of work by a method wherein a stand free to move vertically is arranged on a freely rotatable first shift, and the pivotally supported point of the freely rotatable second shaft pivotally-supported to a case is formed in such a manner that it can be moved on the circular arc having the pivotally-supported point of the case and the second shaft as the center point. CONSTITUTION:A wafer is attracted to a chuck 62, a shaft 52 is rotated by a motor, and the wafer is inspected in the inclined state. When the related member is lowered along a shaft 36 using a gear 48 and a rack 45, the shaft 52 and a housing 57 move on the circular arc having the paint of pivotal support 61 of a housing 57 and a case 58 as the center point from the point of inclination becomes smaller. When a stand 43, the arm 51 and the arm 52 are rotated by a motor 41, the shaft 52 revolves within the plane which passes the point of pivotal support 60 crossing at right angle with the perpendicular line which passes the point of pivotal support 61 with the point 61 as the center point. As a result, the position of the wafer against the case is freely changed, an inspection can be performed with the wafer arranged at the optimum position, thereby enabling to simplify the work. |
