PHOTOLITHOGRAPHIC PROCESS FOR OBTAINING STRUCTURES BY THE LIFT-OFF TECHNIQUE,申请号EP19840104502-传众专利搜索

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发明名称	PHOTOLITHOGRAPHIC PROCESS FOR OBTAINING STRUCTURES BY THE LIFT-OFF TECHNIQUE
摘要
申请公布号	EP0123301(B1)	申请公布日期	1990.12.27
申请号	EP19840104502	申请日期	1984.04.19
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	BULST, WOLF-ECKHART, DIPL.-PHYS.;KEINATH, PETER, DIPL.-ING.;LINDEMANN, GERTRUD
分类号	G03F7/09	主分类号	G03F7/09
代理机构		代理人
主权项
地址

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