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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02310926(A)
申请公布日期
1990.12.26
申请号
JP19890131538
申请日期
1989.05.26
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MACHIDA KATSUYUKI;OIKAWA HIDEO
分类号
H01L21/3205;H01L21/283
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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