发明名称 GAS SEAL FOR METALLIC VAPOR LASER DEVICE
摘要 PURPOSE:To restrain a temperature rise of an O-ring and to realize a long life of gas seal by providing a bendable heat-resistant ring to a vacuum side of the O-ring which is used for gas sealing. CONSTITUTION:An O-ring 11 seals between gas in the inside 3 and a vacuum heat insulating layer 10. A ring 12 has a slit 19 or recesses 20, 21, and is provided to the side of the vacuum heat insulating layer 10 against the O-ring 11. The ring 12 is heated more rapidly than the O-ring 11. Even if rubber of fluorine compound which is known as a heat-resistant material is used as a construction material, a surface of the ring 12 begins to melt to gel and to adhere to surfaces of a peripheral outer tune 8 and a supporting tube 7 when a temperature exceeds 250 deg.C. The ring 12 without sealing function is selectively deteriorated; deterioration of the O-ring 11 is thereby delayed and function of gas sealing can be maintained for a long time.
申请公布号 JPH02310977(A) 申请公布日期 1990.12.26
申请号 JP19890131362 申请日期 1989.05.26
申请人 HITACHI LTD 发明人 NISHIMURA HIDETOMO;YOSHIKAWA TOSHIMITSU;WADA AKIRA;YAMAGUCHI MOTOO;SUGAWARA HIROYUKI;TSUTSUMI YASUYUKI
分类号 H01S3/036;H01S3/03 主分类号 H01S3/036
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