发明名称 Method of fabricating a semiconductor device
摘要 A semiconductor device and method of fabrication thereof includes both narrow and wide element isolation regions which have been fabricated employing a trench isolation technique. The technique allows for the production of wide element isolation regions in submicron semiconductor devices wherein the entire wide element isolation region is covered with an insulating material.
申请公布号 US4980311(A) 申请公布日期 1990.12.25
申请号 US19880275491 申请日期 1988.11.23
申请人 SEIKO EPSON CORPORATION 发明人 NAMOSE, ISAMU
分类号 H01L21/762 主分类号 H01L21/762
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