A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.
申请公布号
US4979643(A)
申请公布日期
1990.12.25
申请号
US19890327281
申请日期
1989.03.22
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
LIPISKO, BRUCE A.;SCHUMACHER, JOHN C.;HOWARD, RICHARD E.;RANDKE, PETER T.;SANDU, ADRIAN;FLETCHER, ROBERT E.;GRAF, HANS-JUERGEN