Metallization layer structure formed on aluminum nitride ceramics and method of producing the metallization layer structure

摘要

A metallization layer structure includes an intermediate layer (15) formed on an aluminum nitride ceramics base (11). The intermediate layer contains aluminum titanium nitride. A titanium layer (12) is formed on the intermediate layer. A heat-resistant metallic layer (13) is formed on the titanium layer. A metallic layer (14) for facilitating soldering or brazing is formed on the heat-resistant metallic layer.