Removal of particles from solid-state surfaces by laser bombardment,申请号US19900474561-传众专利搜索

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发明名称	Removal of particles from solid-state surfaces by laser bombardment
摘要
申请公布号	US4980536(A)	申请公布日期	1990.12.25
申请号	US19900474561	申请日期	1990.01.08
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	ASCH, KARL;KEYSER, JOACHIM;MEISSNER, KLAUS;ZAPKA, WERNER
分类号	B23K26/00;B08B7/00;G03F1/00;G03F7/20;H01L21/027;H01L21/268;H01L21/30;H01L21/304	主分类号	B23K26/00
代理机构		代理人
主权项
地址

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