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发明名称
Substrate potential detecting circuit
摘要
申请公布号
US4980745(A)
申请公布日期
1990.12.25
申请号
US19900523178
申请日期
1990.05.15
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
MUROGA, HIROKI
分类号
H01L21/82;G01R19/155;G01R31/27;H01L21/822;H01L21/8238;H01L27/04;H01L27/092;H01L27/118
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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