ETCHING AND DEVICE THEREFOR,申请号JP19890129513-传众专利搜索

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发明名称	ETCHING AND DEVICE THEREFOR
摘要
申请公布号	JPH02308531(A)	申请公布日期	1990.12.21
申请号	JP19890129513	申请日期	1989.05.23
申请人	FUJITSU LTD	发明人	WATANABE KOJI
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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