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发明名称
NOZZLE FOR VERTICAL TYPE VAPOR GROWTH DEVICE
摘要
申请公布号
JPH02307896(A)
申请公布日期
1990.12.21
申请号
JP19890125142
申请日期
1989.05.18
申请人
TOSHIBA MACH CO LTD
发明人
KASHIWAGI NOBUO;KOBAYASHI TAKEHIKO;MIYANOMAE YOSHIHIRO
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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