| 摘要 |
PURPOSE:To efficiently deposit glass fine powder by controlling the rotational speed of a center member and controlling the surface temp. of the deposit by the flame of a spray burner for supplying a raw material. CONSTITUTION:The raw gas (SiCl4, Ar, etc.) and the combustion gas (H2, O2, etc.) are blown the spray burner 2 for supplying the raw material and supplied on the center member 1 such as a quartz glass rod to deposit glass fine powder 3 on the center member 1. In this case, the fine powder 3 is deposited while rotating the center member 1 and traversing the burner 2, and the diameter of the deposit is progressively increased. The rotational speed of the center member 1 is gradually decreased as the deposit diameter is increased to prolong the contact time with the flame, and the required surface temp. is obtained. Consequently, an increase in the amt. of the combustion gas is controlled. |
