| 摘要 |
PURPOSE:To obtain a laser oscillator constantly stable in performance by a method wherein inclination detecting means are provided to two opposed mirror holders respectively to detect each other's inclination, and the inclination of the mirror holder is automatically corrected through an adjustment motor driven by the output signal of the detecting means. CONSTITUTION:Two opposed mirror holders 3A and 3B installed adjustable in angle to a laser optical axis by an adjusting motor 6, detecting means LDs 1 and 2, PSDs 1, 2, and 17 which detects the inclination of the mirror holders 3A and 3B, and control means 18 and 19 which control the drive of the adjusting motor 6 so as to correct the inclination of the mirror holders by the output signal of the detecting means are provided. The inclinations of the opposed mirror holders 3A and 3B are detected by the detecting means, which signals are sent to the control means 18, the drive volume of the adjusting motor required to correct the inclinations of the mirror holders 3A and 3B is determined through the control means 16, the output corresponding to the drive volume concerned is supplied to the adjusting motor 6 to rotate, whereby the mirror holders 3A and 3B are made to recover their normal attitude. By this setup, stable laser rays can be constantly obtained. |
