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发明名称
CLEANING
摘要
申请公布号
JPH02305440(A)
申请公布日期
1990.12.19
申请号
JP19890125588
申请日期
1989.05.20
申请人
FURENDOTETSUKU KENKYUSHO:KK
发明人
TAKAGI MIKIO
分类号
B08B7/00;H01L21/304
主分类号
B08B7/00
代理机构
代理人
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