| 摘要 |
PURPOSE:To reduce fluctuation of an offset voltage by sealing a structural body of a tuning fork using a piezoelectric bimorph under an air-tight condition with a gas pressure not higher than 1 atm. CONSTITUTION:A conductive connecting member 7 is inserted between driving piezoelectric bimorphs 3,4, so that the connecting member 7 is electrically and mechanically connected to an inner electrode of each bimorph 3,4. Lead terminals 8,11-16 are electrically connected to bimorphs 1-4, and isolated from a support base 10 through insulating glasses 9,17-20. A relay base plate 23 supports the lead terminals 13-16, and electrically connects the bimorphs 1 with 2. Likewise, the bimorphs 3,4 are connected with each other through soldering. The obtained item is housed in a can 30. A connecting portion between the base 10 and a peripheral edge portion of an opening of the can 30 is air- tightly sealed through electric spot welding. At this time, an air-tight gas 31 is filled inside the can 30. Accordingly, fluctuation of an offset voltage of a sensor can be greatly reduced in this manner. |
