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发明名称
METHOD OF FORMING RESIST PATTERN
摘要
申请公布号
EP0185366(B1)
申请公布日期
1990.12.19
申请号
EP19850116113
申请日期
1985.12.17
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
MATSUOKA, YASUO;TSUCHIYA, TAKASHI
分类号
G03F7/40;G03F7/38
主分类号
G03F7/40
代理机构
代理人
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地址
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