发明名称 X-Y-Z-THETA TABLE FOR PHOTOSENSITIVE DRUM
摘要 PURPOSE:To enable observation of a photosensitive drum intact as cylinder by arranging the table to be fixed on the photosensitive drum itself in a non- contact manner while being movable in directions of X, Y, Z and theta when a measurement or observation is performed with an optical system film thickness measuring device, an optical type microscope or the like. CONSTITUTION:A measuring table has a photosensitive drum 1, an X-wise moving motor 2, an X-wise moving slide 3, an X-wise rotary handle 4, an X-wise scale 5, a theta-wise scale 6, a Z-wise focusing handle 7, a photosensitive drum fixing pin 8, and a Y-wise moving micrometer 9. With such an arrangement, when a measurement of optical system thickness, a measurement and observa tion with an optical type microscope or the like are performed, the drum 1 can be fixed non-contact and moved in directions X, Y, Z and theta. Thus, there is no possibility of damaging or contaminating the drum in fixing thereof or in moving thereof in the directions of X, Y, Z and theta thereby accomplishing a comparison or the like of samples stably at the same point.
申请公布号 JPH02306190(A) 申请公布日期 1990.12.19
申请号 JP19890125710 申请日期 1989.05.19
申请人 NEC CORP 发明人 HORII CHIAKI;KIMURA SHIRO
分类号 G12B5/00;G03G21/00 主分类号 G12B5/00
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