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发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH02305962(A)
申请公布日期
1990.12.19
申请号
JP19890128316
申请日期
1989.05.22
申请人
RAIMUZU:KK
发明人
MURATA HIDEAKI;SANO KENICHI;YONEMOTO TAKAHARU;EBISAWA TAKASHI;MORI TAIICHI;MIYAGAWA TSUGIO
分类号
C23C14/38
主分类号
C23C14/38
代理机构
代理人
主权项
地址
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