| 摘要 |
<p>PURPOSE:To prevent the intrusion of dust between a reticule and pellicles by constituting pellicle mounting bases in such a manner that these bases can turn around one point on the surface thereof and narrowing the spacings between a fixing base and the pellicle mounting bases. CONSTITUTION:The pellicle mounting bases 17 turn 90 deg. around a guide bar 16 in the position where the spacing between the opposite surfaces of the fixing base 15 and the pellicle mounting bases 17 attains 1cm when the pellicle mounting bases 17 are moved in both side directions from the fixing base 15. The reticule 4 is then mounted to the fixing base 15 and the pellicles 11 to the pellicle mounting bases 17. After protective paper 19 of the pellicles 11 are stripped, the pellicle mounting bases 17 are first raised in a counterclockwise direction as shown by an arrow A and are further pressed to the fixing base 15 as shown by an arrow B. Two pieces of the pellicles 11 are, therefore, mounted respectively to both surfaces of the reticule 4 by a tacky adhesive agent 18. The number of the dust intruding between the reticule 4 and the pellicles 11 is decreased in this way.</p> |
