| 摘要 |
PURPOSE:To suppress the generation of the corrosion (after-corrosion) of aluminum wirings disposed on a substrate by incorporating a lanthanide porphyrin complex having polar groups into the above liquid. CONSTITUTION:The lanthanide porphyrin complex contg. the polar groups is incorporated into the rinsing liquid used for a chemical amplification type resist contg. an acid generating agent which generates halogen acid when irradi ated with light. The halogen ions of the halogen acid generated from the acid generating agent of the chemical amplification type resist by an exposing processing are, therefore, captured by the lanthanide porphyrin complex, by which the excess halogen ions are removed from, for example, the aluminum wirings, etc. The corrosion of the aluminum wirings, etc., are prevented in this way. |
