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发明名称
Vertical stepper
摘要
申请公布号
US4979195(A)
申请公布日期
1990.12.18
申请号
US19890409713
申请日期
1989.09.20
申请人
FUJITSU LIMITED
发明人
TABATA, FUMIO;SEKIGUCHI, HIDENORI;KAMADA, TORU;SAKATA, YUJI
分类号
B23Q1/36;B23Q1/62;B23Q5/50;B23Q11/00;G03F7/20
主分类号
B23Q1/36
代理机构
代理人
主权项
地址
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