PRODUCTION OF OPTICAL MASTER DISK

摘要

PURPOSE:To form pits having enough depth and side walls perpendicular to the master disk and to suppress roughening of the surface of the master disk by removing photoresist by etching with an ion beam almost perpendicular to the disk and then treating the surface with low-energy ion irradiation. CONSTITUTION:The master disk 4 is coated with resist, cut with light and developed, and then covered with a mask 3 to reduce the oblique component of a beam 2. Then the disk is irradiated with ion beam 2 almost perpendicular to the disk to etch. Then the photoresist is removed and the disk is subjected to surface treatment with low energy ion irradiation. Thereby the pits thus formed have enough depth and side walls perpendicular to the disk, and roughening of the disk 4 can be suppressed.