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发明名称
PLASMA TREATER
摘要
申请公布号
JPH02304920(A)
申请公布日期
1990.12.18
申请号
JP19890124327
申请日期
1989.05.19
申请人
HITACHI LTD
发明人
WATANABE SEIICHI;KAKEHI YUTAKA;AKIBA MASAKUNI;KANAI SABURO
分类号
C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
C23F4/00
代理机构
代理人
主权项
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