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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH02303027(A)
申请公布日期
1990.12.17
申请号
JP19890123340
申请日期
1989.05.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
MASUKO YOJI
分类号
B08B3/10;H01L21/304
主分类号
B08B3/10
代理机构
代理人
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