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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02303051(A)
申请公布日期
1990.12.17
申请号
JP19890123337
申请日期
1989.05.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAEKAWA SHIGETAKA
分类号
H01L23/52;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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