| 摘要 |
PURPOSE:To shorten machining process and time by forming an electrode pattern through a vacuum evaporator provided with a physical assist unit. CONSTITUTION:An electrode pattern is formed, through a vacuum evaporator provided with an ion beam device, onto the surface of a piezoelectric element 3 for an ultrasonic motor. The system comprises a filming chamber 1, an evaporation umbrella 2, a pattern mask 4, an ion gun 6 and power source 7 therefor, a neutralizer 8, an argon cylinder 9 for projecting ion beams 5, and an electron gun 10 for forming a nickel electrode onto the surface of the piezoelectric element. |
