| 摘要 |
PURPOSE:To control the machining in line by a method wherein a surface already machined is measured with an interferometer by utilizing that the surface ultra-precision-machined of a workpiece serves as a mirror optically and the position of a tool nose is controlled with the surface already machined as reference surface. CONSTITUTION:The interferometric measuring device 5 is located at the position where chips generated by machining with a diamond single point cutting tool 4 do not hinder the action of the interferometric measuring device 5. During machining, the device 5 is set so as to detect the position ahead by one or two pitches of feed of the finishing-cut surface 2a with the diamond single point cutting tool 4 and a tool rest 3 as a whole or the diamond single point cutting tool 4 only is so controlled as to advance and retreat in order to keep d=l-epsilon constant, where l is the depth of cut, d is the positon of the reference plane 12 of the device 5 and epsilon is the protruded amount of the reference plane 12 from the tool rest 3. Owing to the method as described above, the ultra-precision machining method having a controlling system, which does not primarily influenced with disturbance and strain due to thermal stress, can be obtained. |
