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发明名称
摘要
申请公布号
JPH0260056(B2)
申请公布日期
1990.12.14
申请号
JP19840149814
申请日期
1984.07.20
申请人
INTAANASHONARU BIJINESU MASHIINZU CORP
发明人
FUANGUUSHI YORUDAN RAI;RONARUDO NOOMAN SHURUTSU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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