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发明名称
PIPING FOR PHOSPHORUS-CONTAINING GAS
摘要
申请公布号
JPH02302395(A)
申请公布日期
1990.12.14
申请号
JP19890123866
申请日期
1989.05.17
申请人
SANTETSUKU SYST:KK
发明人
AKIMOTO SEIJI;SEKINOBE MASAAKI
分类号
F17D1/04;C30B25/14;C30B29/40;H01L21/205
主分类号
F17D1/04
代理机构
代理人
主权项
地址
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