发明名称 PROCESS FOR MANUFACTURING DOPED SEMICONDUCTOR LAYERS
摘要 In a process for manufacturing doped semiconductor layers with a low charge carrier concentration, a plurality of thin layers containing relatively high charge carrier concentrations are superimposed alternately with undoped layers. The thickness and charge carrier concentration of the individual layers are chosen so that the average charge carrier concentration of the plurality of layers is as low as desired.
申请公布号 WO9015435(A1) 申请公布日期 1990.12.13
申请号 WO1990DE00425 申请日期 1990.06.02
申请人 AIXTRON GMBH 发明人 JUERGENSEN, HOLGER
分类号 H01L21/205;H01L21/20;H01L21/203;H01L21/22;H01L21/225 主分类号 H01L21/205
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