| 摘要 |
PURPOSE:To increase the overall integration degree of a laminated type semiconductor integrated circuit by performing signal transmission between the upper and lower layers with a columnar semiconductor whose conductivity is controlled by an external electrode. CONSTITUTION:The conductivity of a columnar semiconductor 7a can be controlled by producing a depletion layer 10 in the columnar semiconductor 7a by changing the voltage of an external electrode 8 or 9, and then changing the size of the depletion layer 10 produced. Namely, this columnar semiconductor 7a operates by dint of the depletion layer 10 like a junction FET which controls the conductivity of the channel. Besides, each gate electrode 8, 9 can be used independently and signals different from each other can be applied to them. |
